Facility environmental performance goals in the semiconductor manufacturing industry go straight to the bottom line. Beyond basic regulatory compliance, the emphasis is on finding ways to optimize the use of water, energy, and chemicals in order to increase manufacturing process efficiency. These resources are expensive and have limited availability within the typical fab environment.

opsInfo™ helps you manage the complexities of your semiconductor industry environmental compliance and sustainability program. Air, waste, and chemical inventory management modules can all be brought together to demonstrate regulatory compliance and enable mass-balance calculations to be used in predicting and optimizing tool support requirements. Actual data measurements (e.g., from wastewater treatment samples) are easily included, either through discrete (grab) or continuous sampling. Trend analysis and reports help demonstrate progress toward meeting ISO 14001 objectives and targets. The result: a multi-media approach to environmental management that helps semiconductor manufacturing companies meet their compliance challenges effectively and optimize use of valuable resources.

Typical Environmental Challenges in the Semiconductor Industry

Challenge	IHS Solution
Process optimization for cost savings and ISO 14001 demonstration	Ultrapure water, energy, and chemical usage can be tracked as a function of wafer throughput to identify areas for improvement, leading to significant cost savings.
Chemical inventory management	The software tracks materials from the gas pad to fab to waste disposal area, including bar-code tracking of containers.
Multiple facilities	Scaleable solution can be extended from a single process area to the entire fab.
Numerous fab employees responsible for compliance	A simple and user-friendly interface makes the software accessible to end-users who are not programmers. Web-based reporting makes it easy and convenient for facility staff to track compliance tasks.